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Cleanroom classifications
The cleanroom standards tables indicate the maximum number of allowable particles of the indicated size percubic foot (for US FED) or cubic meter (for ISO) for each class.
US FED STD 209E cleanroom standards
| particle/ft³ | ||||||
| Class | 0.1 µm | 0.2 µm | 0.3 µm | >0.5 µm | >1 µm | >5 µm |
|
1 |
35 |
7 |
3 |
1 |
|
|
|
10 |
350 |
75 |
30 |
10 |
1 |
|
|
100 |
3500 |
750 |
300 |
100 |
10 |
1 |
|
1,000 |
|
|
|
1,000 |
100 |
10 |
|
10,000 |
|
|
|
10,000 |
1,000 |
100 |
|
100,000 |
|
|
|
100,000 |
10,000 |
1,000 |
NOTE: US FED STD 209E was canceled November 29, 2001.
ISO 14644-1 cleanroom standards
| particle/m³ | ||||||
| Class | 0.1 µm | 0.2 µm | 0.3 µm | 0.5 µm | 1 µm | 5 µm |
| ISO 1 |
10 |
2 |
|
|
|
|
| ISO 2 |
100 |
24 |
10 |
4 |
|
|
| ISO 3 |
1,000 |
237 |
102 |
35 |
8 |
|
| ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
| ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
| ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
|
ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
|
ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
|
ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
Cleanroom class comparison
| ISO 14644-1 | FED STD 209E |
| ISO 3 | 1 |
| ISO 4 | 10 |
| ISO 5 | 100 |
| ISO 6 | 1,000 |
| ISO 7 | 10,000 |
| ISO 8 | 100,000 |
The table is derived from the following formula:
where:
Cn represents the maximum permitted concentration ( in particles/m³ of air ) of airborne particles that are equal
to or larger than the considered particle size. Cn is rounded to the nearest whole number.
N is the ISO classification number, which shall not exceed the value of 9. Intermediate ISO classification
numbers may be specified; with 0.1 the smallest permitted increment of N.
D is the considered particle size in micrometers.
0.1 is a constant with a dimension of micrometers.
The Table shows a crossover to the old FS 209 classes e.g. ISO 5 is equivalent to the old FS 209 Class 100.
Information taken from:
-
www.answers.com (January 2006)
-
http://www.filterair.info (January 2006)
-
http://www.s2c2.co.uk/ (January 2006)
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